F Turbo molecular vacuum pump
F Series high pressure compound molecular pump is consisted of turbo molecular pump and disc tractive pump. It has two type pumps' characteristics that is, large pumping speed, high compression ratio and high pressure. It expands the application range of the turbo molecular pump.
Main Features:
It can obtain the clean high vacuum and ultra-high vacuum without cold trap and oil baffle, because the gas with large volume can obtain high compression ratio.
1.Compact structure, small occupied space.
2.High gas flow rate, high pumping speed
3.Flexible position for installation
4.longer maintenance intervals
Applications:
Semiconductor production
Vacuum processing technology
Mass spectrometric analysis
R & D and the chemical industry
Vacuum coating equipment
|
Model |
F100/180 |
F100/300 |
F400/3600 |
||||
|
Inlet flange |
— |
LF100 |
CF100 |
LF100 |
CF100 |
LF400 |
CF400 |
|
Outlet flange |
— |
KF25( DN25 ISO-KF) |
KF25( DN25 ISO-KF) |
KF40( DN40 ISO-KF) |
|||
|
Pumping speed |
L/s |
180 |
300 |
3600 |
|||
|
Limit pressure |
Pa |
5×10-7 |
6×10-6 |
5×10-7 |
6×10-6 |
5*10-7 |
6*10-6 |
|
Inlet start pressure |
Pa |
800 |
- |
||||
|
Inlet withstanding impact pressure |
Pa |
600 |
- |
||||
|
Compression rate N2/H2 |
— |
1×108/5×102 |
1×108/6×102 |
||||
|
Motor rotary speed |
rpm |
24000-36000 |
13200 |
||||
|
Motor Power |
W |
5×10-7 |
6×10-6 |
5×10-7 |
＜280 |
||
|
Startup time |
min |
＜6 |
＜20 |
||||
|
Bearing |
— |
Ceramic Bearing |
|||||
|
Backing pump |
L/s |
3 |
3-6 |
18 Mechanical pump +70 Roots pump |
|||
|
Cooling water temperature |
℃ |
≤25 |
|||||
|
Cooling water consumption |
L/min |
＞1 |
|||||
|
Baking temperature of the pump body |
℃ |
≤100 |
|||||
|
Using temperature |
℃ |
Water Cooling ＜40; Air cooling ＜32 |
Water Cooling ＜40 |
||||
|
Installation direction |
— |
Vertical or horizontal |
Vertical |
||||
|
Weight |
kg |
～16 |
~19 |
~102 |
|||
Contact : Martin Miao, 0086 21 50878197
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