F Turbo molecular vacuum pump
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China Equipment goods
Equipment goods

F Turbo molecular vacuum pump

F Series high pressure compound molecular pump is consisted of turbo molecular pump and disc tractive pump. It has two type pumps' characteristics that is, large pumping speed, high compression ratio and high pressure. It expands the application range of the turbo molecular pump.


Main Features:
It can obtain the clean high vacuum and ultra-high vacuum without cold trap and oil baffle, because the gas with large volume can obtain high compression ratio.
1.Compact structure, small occupied space.
2.High gas flow rate, high pumping speed
3.Flexible position for installation
4.longer maintenance intervals


Applications:
Semiconductor production
Vacuum processing technology
Mass spectrometric analysis
R & D and the chemical industry
Vacuum coating equipment

Model

F100/180

F100/300

F400/3600

Inlet flange

—

LF100

CF100

LF100

CF100

LF400

CF400

Outlet flange

—

KF25( DN25 ISO-KF)

KF25( DN25 ISO-KF)

KF40( DN40 ISO-KF)

Pumping speed

L/s

180

300

3600

Limit pressure

Pa

5×10-7

6×10-6

5×10-7

6×10-6

5*10-7

6*10-6

Inlet start pressure

Pa

800

-

Inlet withstanding impact pressure

Pa

600

-

Compression rate N2/H2

—

1×108/5×102

1×108/6×102

Motor rotary speed

rpm

24000-36000

13200

Motor Power

W

5×10-7

6×10-6

5×10-7

＜280

Startup time

min

＜6

＜20

Bearing

—

Ceramic Bearing

Backing pump

L/s

3

3-6

18 Mechanical pump

+70 Roots pump

Cooling water temperature

℃

≤25

Cooling water consumption

L/min

＞1

Baking temperature of the pump body

℃

≤100

Using temperature

℃

Water Cooling ＜40;

Air cooling ＜32

Water Cooling ＜40

Installation direction

—

Vertical or horizontal

Vertical

Weight

kg

～16

~19

~102

Location : Room 502,No.1299,XinJinQiao RD, Pudong New Area, ShangHai, China., 201206 ShangHai,
Contact : Martin Miao, 0086 21 50878197

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