FF Compound turbo molecular vacuum pump
Compound molecular pump FF series
FF series compound molecular pump is one of mechanical vacuum pumps which gaining superhigh vacuum by high speed rotator carrying gas molecules.
It is constituted by turbo molecular pump and disc tractive pump. It simultaneously got speedy pumping,high compressed rate features of turbo molecular pump during molecular flow,and speedy pumping, high compressed rate features of tractive pump when withhigh pressure, except that it also extended the application scope of compound molecular pump.
Feature:
This pump has no optionor memoral effect to pumped gas.
Because there is high compression rate to gas with heavy molecular weight, the pump may get clean high vacuum and ultrahigh vacuum without cold trap baffle plate.
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Model |
FF150/600 |
FF200/1200 |
FF250/1600 |
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|
Inlet flange |
— |
LF150 |
CF150 |
LF200 |
CF200 |
LF250 |
CF200 |
|
Outlet flange |
— |
KF40( DN40 ISO-KF) |
|||||
|
Pumping speed |
L/s |
600 |
1200 |
1600 |
|||
|
Limit pressure |
Pa |
3*10-7 / 5*10-6 |
|||||
|
Compression rate N2/H2 |
— |
1×109/8×103 |
1×108/6×103 |
||||
|
Motor rotary speed |
rpm |
24000 |
21000 |
||||
|
Motor Power |
W |
＜200 |
|||||
|
Startup time |
min |
＜6 |
＜8 |
||||
|
Bearing |
— |
Ceramic Bearing |
|||||
|
Backing pump |
L/s |
6 |
＞8 |
8-25 |
|||
|
Cooling water temperature |
℃ |
≤25 |
|||||
|
Cooling water consumption |
L/min |
＞1 |
|||||
|
Baking temperature of the pump body |
℃ |
≤100 |
|||||
|
Using temperature |
℃ |
Water Cooling ＜40; Air cooling ＜32 |
|||||
|
Installation direction |
— |
Vertical or Horizontal |
|||||
|
Weight |
kg |
34 |
40 |
45 |
|||
Contact : Martin Miao, 0086 21 50878197
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