Megasonic Cleaning Equipment Systems

The megasonic cleaning systems are Ultrasonic devices that can emit ultrasound in megahertz are widely used in the field of semiconductor manufacturing, and in addition to cleaning, megasonic ultrasonic cleaner and megasonic transducer can also play an important role in key processes such as chemical mechanical polishing, development, photoresist stripping, lift-off, etching and so on. The ultrasonic with the high frequency in megahertz is also called "megasonic" in the industry. We provide megasonic cleaning equipment for sale at a good price. Please feel free to contact us.

Types Of Megasonic Cleaning Systems

Batch Type Megasonic Plate

Shower Type Megasonic Nozzle

Cover Type Megasonic Unit

High Frequency Megasonic Cleaning Equipment Systems Advantages

Megasonic cleaning systems operate beyond the usual range of ultrasonic nebulizer transducer such as ultrasonic cleaners, usually from 400 kHz to 3 MHz.

Due to the higher frequency, the megasonic ultrasonic cleaning bubbles from cavitations in the cleaning solution are smaller and less energetic but more numerous.

Therefore the higher frequencies and megasonic ultrasonic used in megasonic cleaning provide more gentle cleaning of fragile items and the removal of microscopic contaminants.

Features of Shower Megasonic Nozzle

Compared with the batch type megasonic transducer device placed at the bottom of the tank, Shower type ultrasonic nozzle has higher acoustic transmission efficiency and can avoid secondary pollution. It is especially suitable for the high-precision wet process on a single wafer.

How Does Megasonic Cleaning Technology Work?

Megasonic cleaning systems utilize high frequency sound waves to remove particles and contaminants from surfaces. The equipment uses megasonic transducers to generate ultrasonic waves with frequencies ranging from 0.5 MHz to 5 MHz, which are transmitted to the cleaning solution. The cleaning solution contains microscopic bubbles that expand and contract rapidly, producing strong shock waves that loosen and remove contaminants from the surface being cleaned.

Megasonic cleaning equipment typically consists of a tank, generator, transducer, and cleaning solution. The tank holds the cleaning solution and the item being cleaned, while the generator powers the transducer, which converts electrical energy into mechanical vibrations. The vibrations are transmitted to the cleaning solution, causing the formation of the microscopic bubbles. The bubbles collapse rapidly, creating high-energy shock waves that dislodge and remove contaminants from the surface of the item.

Megasonic ultrasonic cleaners are used in a variety of industries, including semiconductor manufacturing, medical device manufacturing, and optics production. They offer an efficient and effective method for cleaning delicate parts and surfaces without causing damage or leaving behind residue.