4 INCH C-PLANE(0001) SAPPHIRE WAFERS
Wafer saphir is being used extensively as a substrate for III-V nitrides and for many other epitaxial films. We supply 99.999% high purity sapphire wafers with an excellent surface finish to meet your rigorous requirements.
Specifications of 4 Inch C-plane(0001) Sapphire Wafer
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Item |
4-inch C-plane(0001) 650μm Sapphire Wafers |
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Crystal Materials |
99,999%, High Purity, Monocrystalline Al2O3 |
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Grade |
Prime, Epi-Ready |
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Surface Orientation |
C-plane(0001) |
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C-plane off-angle toward M-axis 0.2 +/- 0.1° |
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Diameter |
100.0 mm +/- 0.1 mm |
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Thickness |
650 μm +/- 25 μm |
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Primary Flat Orientation |
A-plane(11-20) +/- 0.2° |
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Primary Flat Length |
30.0 mm +/- 1.0 mm |
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Single Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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(SSP) |
Back Surface |
Fine ground, Ra = 0.8 μm to 1.2 μm |
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Double Side Polished |
Front Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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(DSP) |
Back Surface |
Epi-polished, Ra < 0.2 nm (by AFM) |
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TTV |
< 20 μm |
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BOW |
< 20 μm |
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WARP |
< 20 μm |
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Cleaning / Packaging |
Class 100 cleanroom cleaning and vacuum packaging, |
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25 pieces in one cassette packaging or single piece packaging. |
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Note: Custom c axis sapphire with any orientation and any thickness can be provided.
If you want to know more about custom sapphire optics, please contact us.
Contact : Zhu Wind, +86 0391 393 3936
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