2mhz,13.56mhz,64mhz solid state RF power supply
Price : 5000-30000 usd
Solid state RF power generators
Solid state RF generators including 2MHz, 13.56 MHz, 27 MHz, 64 MHz at output power of 1 KW,3 KW,10 KW,20 KW is the frequency most commonly used for plasma processes. Solid state RF generators are the most advanced class generators commercially available. These RF generators are designed for all plasma processes applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.
Features :
- Frequency Stability 50PPM
- Wide load impedance range
- Excellent reliability
-
型号
Model
规格书
Data sheet
频率
Freq.
(MHz)
输出功率
Pout
(W)
供电电压
Vin
(V)
效率
Efficiency
(%)
散热方式
Heat Dissipation
尺寸
Dimension
Solid-state RF generator—固态射频电源
WSPS-13.56-1000
13.56
1000
220V
65
Air cooling
WSPS-13.56-3000
13.56
3000
220V
65
Water cooling
WSPS-27-1000
27
1000
220V
65
Air cooling
WSPS-27-3000
27
3000
220V
65
Water cooling
WSPS-64-1000
64
1000
220V
65
Air cooling
WSPS-64-3000
64
3000
220V
65
Water cooling
WSPS-162-1000
162.5
1000
220V
65
Air cooling
WSPS-162-3000
162.5
3000
220V
65
Water cooling
WSPS-325-800
325
800
220V
60
Air cooling
WSPS-325-1500
325
1500
220V
60
Water cooling
WSPS-325-3000
325
3000
220V
60
Water cooling
WSPS-433-100
433
100
28V
65
Air cooling
Solid-state MW generator—固态微波源
WSPS-433-500
433
500
220V
65
Air cooling
WSPS-433-1000
433
1000
220V
60
Water cooling
WSPS-915-200
915
200
28V
60
Air cooling
WSPS-915-500
915
500
220V
60
Air cooling
WSPS-915-1000
915
1000
220V
60
Water cooling
WSPS-2450-100
2450
100
28V
45
Air cooling
WSPS-2450-200
2450
200
28V
45
Air cooling
WSPS-2450-500
2450
500
220V
40
Water cooling
WSPS-2450-1000
2450
1000
220V
40
Water cooling
Customized solid state RF&MW generator is available .
Contact : Rae Lee, 86 28 85964677
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