Equipment goods

2mhz,13.56mhz,64mhz solid state RF power supply

Price : 5000-30000 usd

Solid state RF power generators

Solid state RF generators including 2MHz, 13.56 MHz, 27 MHz, 64 MHz at output power of 1 KW,3 KW,10 KW,20 KW is the frequency most commonly used for plasma processes. Solid state RF generators are the most advanced class generators commercially available. These RF generators are designed for all plasma processes applications including, PECVD, HDPCVD, PVD, ALD, etch and strip for the manufacture of integrated circuits, solar cells, flat panel displays, LEDs and data storage devices.

Features :

  • Frequency Stability 50PPM
  • Wide load impedance range
  • Excellent reliability
  • 型号

    Model

    规格书

    Data sheet

    频率

    Freq.

    (MHz

    输出功率

    Pout

    (W

    供电电压

    Vin

    (V

    效率

    Efficiency

    (%

    散热方式

    Heat Dissipation

    尺寸

    Dimension

    Solid-state RF generator—固态射频电源

    WSPS-13.56-1000

    13.56

    1000

    220V

    65

    Air cooling

    WSPS-13.56-3000

    13.56

    3000

    220V

    65

    Water cooling

    WSPS-27-1000

    27

    1000

    220V

    65

    Air cooling

    WSPS-27-3000

    27

    3000

    220V

    65

    Water cooling

    WSPS-64-1000

    64

    1000

    220V

    65

    Air cooling

    WSPS-64-3000

    64

    3000

    220V

    65

    Water cooling

    WSPS-162-1000

    162.5

    1000

    220V

    65

    Air cooling

    WSPS-162-3000

    162.5

    3000

    220V

    65

    Water cooling

    WSPS-325-800

    325

    800

    220V

    60

    Air cooling

    WSPS-325-1500

    325

    1500

    220V

    60

    Water cooling

    WSPS-325-3000

    325

    3000

    220V

    60

    Water cooling

    WSPS-433-100

    433

    100

    28V

    65

    Air cooling

    Solid-state MW generator—固态微波源

    WSPS-433-500

    433

    500

    220V

    65

    Air cooling

    WSPS-433-1000

    433

    1000

    220V

    60

    Water cooling

    WSPS-915-200

    915

    200

    28V

    60

    Air cooling

    WSPS-915-500

    915

    500

    220V

    60

    Air cooling

    WSPS-915-1000

    915

    1000

    220V

    60

    Water cooling

    WSPS-2450-100

    2450

    100

    28V

    45

    Air cooling

    WSPS-2450-200

    2450

    200

    28V

    45

    Air cooling

    WSPS-2450-500

    2450

    500

    220V

    40

    Water cooling

    WSPS-2450-1000

    2450

    1000

    220V

    40

    Water cooling

    Customized solid state RF&MW generator is available .

Location : No.1 building, High-tech Incubator Park,No.1480 of the northen section of Tianfu avenue, High-tech district ,Chengdu , 610000 Chengdu,
Contact : Rae Lee, 86 28 85964677

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2mhz,13.56mhz,64mhz solid state RF power supply

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